Transistors Having Nanostructures

ABSTRACT

A semiconductor device according to the present disclosure includes a first transistor and a second transistor. The first transistor includes a plurality of first channel members and a first gate structure wrapping around each of the plurality of first channel members. The second transistor includes a plurality of second channel members and a second gate structure disposed over the plurality of second channel members. Each of the plurality of first channel members has a first width and a first height smaller than the first width. Each of the plurality of second channel members has a second width and a second height greater than the second width.

PRIORITY DATA

This application claims priority to U.S. Provisional Patent ApplicationNo. 63/013,354 filed on Apr. 21, 2020, entitled “TRANSISTORS HAVINGNANOSTRUCTURES” (Attorney Docket No. 2020-1019/24061.4181PV01), theentire disclosure of which is hereby incorporated herein by reference.

BACKGROUND

The semiconductor integrated circuit (IC) industry has experiencedexponential growth. Technological advances in IC materials and designhave produced generations of ICs where each generation has smaller andmore complex circuits than the previous generation. In the course of ICevolution, functional density (i.e., the number of interconnecteddevices per chip area) has generally increased while geometry size(i.e., the smallest component (or line) that can be created using afabrication process) has decreased. This scaling down process generallyprovides benefits by increasing production efficiency and loweringassociated costs. Such scaling down has also increased the complexity ofprocessing and manufacturing ICs.

For example, as integrated circuit (IC) technologies progress towardssmaller technology nodes, multi-gate devices have been introduced toimprove gate control by increasing gate-channel coupling, reducingoff-state current, and reducing short-channel effects (SCEs). Amulti-gate device generally refers to a device having a gate structure,or portion thereof, disposed over more than one side of a channelregion. Fin-like field effect transistors (FinFETs) andmulti-bridge-channel (MBC) transistors are examples of multi-gatedevices that have become popular and promising candidates for highperformance and low leakage applications. A FinFET has an elevatedchannel wrapped by a gate on more than one side (for example, the gatewraps a top and sidewalls of a “fin” of semiconductor material extendingfrom a substrate). An MBC transistor has a gate structure that canextend, partially or fully, around a channel region to provide access tothe channel region on two or more sides. Because its gate structuresurrounds the channel regions, an MBC transistor may also be referred toas a surrounding gate transistor (SGT) or a gate-all-around (GAA)transistor. The channel region of an MBC transistor may be formed fromnanowires, nanosheets, or other nanostructures and for that reasons, anMBC transistor may also be referred to as a nanowire transistor or ananosheet transistor.

A channel region of an MBC transistor may have a sheet-like shape, wherethe width of the channel region is greater than its height to enhancedrive current of the MBC transistor. Such an MBC transistor may besuitable for high drive current application and but may not be ideal forother applications where packing density and cell size trump are morecritical. Therefore, although conventional MBC transistors have beengenerally adequate for their intended purposes, they are notsatisfactory in every respect.

BRIEF DESCRIPTION OF THE DRAWINGS

The present disclosure is best understood from the following detaileddescription when read with the accompanying figures. It is emphasizedthat, in accordance with the standard practice in the industry, variousfeatures are not drawn to scale and are used for illustration purposesonly. In fact, the dimensions of the various features may be arbitrarilyincreased or reduced for clarity of discussion.

FIG. 1 collectively illustrate a flowchart of a method for forming asemiconductor device having multiple device areas, according to one ormore aspects of the present disclosure.

FIGS. 2A-26A, 2B-26B, and 15C-26C illustrate cross-sectional views of aworkpiece during a fabrication process according to the method in FIG.1, according to one or more aspects of the present disclosure.

FIGS. 27-29 illustrate cross-sectional views of channel members,according to one or more aspects of the present disclosure.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly. Still further, when anumber or a range of numbers is described with “about,” “approximate,”and the like, the term is intended to encompass numbers that are within+/−10% of the number described, unless otherwise specified. For example,the term “about 5 nm” encompasses the dimension range from 4.5 nm to 5.5nm.

The present disclosure is generally related to multi-gate transistorsand fabrication methods, and more particularly to a semiconductor devicethat includes more than one type of channel members to meet differentdevice requirements.

MBC transistors are promising candidates for next generation devices.For application where high drive current and high switching speed arerequired, channel members of an MBC transistor may have a sheet-likeshape and such channel members may be referred to as nanosheet channelmembers. A nanosheet channel member has a width greater than its heightfor drive current enhancement. For some other applications, such assystem-on-chip (SoC) and static random access memory (SRAM)applications, drive current is not the most important requirement.Instead, lower power consumption and shorter cell height is the keyindex. When MBC transistors with nanowire channel members are used forthese latter applications, the drive current may drop considerably dueto the low effective width. Here, a nanowire channel member refers to achannel member whose width is substantially identical to its height.

The present disclosure provides a semiconductor device that includesvertical nanosheet channel members in a first area and horizontalnanosheet channel members in a second area. When the first device areais for high drive current application and the second device area is forhigh-packing-density application, the horizontal nanosheet channelmembers provide increased drive current and improved speed. The verticalnanosheet channel members provides narrow footprint to increase packingdensity, while still allowing sufficient effective width forsatisfactory driving current levels. Alternatively, the first area maybe n-type device area and the second area may be p-type device area. Thehorizontal nanosheet channel members include primary surfaces suitablefor n-type charge carriers and the vertical nanosheet channel membersinclude primary surfaces suitable for p-type charge carriers. Thepresent disclosure also provides example processes for forming such asemiconductor device.

The various aspects of the present disclosure will now be described inmore detail with reference to the figures. In that regard, FIG. 1 is aflowchart illustrating a method 100 for fabricating a semiconductordevice according to embodiments of the present disclosure. The method100 is merely an example and is not intended to limit the presentdisclosure to what is explicitly illustrated in the method 100.Additional steps can be provided before, during, and after the method100, and some steps described can be replaced, eliminated, or movedaround for additional embodiments of the method. Not all steps aredescribed herein in detail for reasons of simplicity. The method 100 isdescribed below in conjunction with FIGS. 2A-26A, 2B-26B, and 15C-26C,which are fragmentary cross-sectional views of a workpiece at differentstages of fabrication according to embodiments of the presentdisclosure. FIGS. 27-29 illustrate cross-sectional views of channelmembers in channel regions, according to various aspects of the presentdisclosure. A workpiece 200 is illustrated in FIGS. 2A-26A, 2B-26B,15C-26C, and 27-29. Because a semiconductor device will be formed fromthe workpiece 200, the workpiece 200 may also be referred to as asemiconductor device 200 as the context requires.

Referring to FIGS. 1, 2A and 2B, the method 100 includes block 102 wherea workpiece 200 is provided. FIG. 2A illustrates a fragmentarycross-sectional view of the workpiece 200 along the Y direction and FIG.2B illustrate a fragmentary cross-sectional view along the X direction.As shown in FIGS. 2A and 2B, the workpiece 200 includes a substrate 202and a stack 204 disposed over the substrate 202. The stack 204 includessacrificial layers 206 and the channel layers 208 stacked vertically inan alternating configuration. Put differently, the stack 204 includes aplurality of channel layers 208 interleaved by a plurality ofsacrificial layers 206. In one embodiment, the substrate 202 may be asemiconductor substrate such as a silicon substrate. The substrate 202may include various layers, including conductive or insulating layersformed on a semiconductor substrate. The substrate 202 may includevarious doping configurations depending on design requirements as isknown in the art. For example, different doping profiles (e.g., n-wells,p-wells) may be formed on the substrate 202 in regions designed fordifferent device types (e.g., n-type transistors or p-type transistors).The suitable doping may include ion implantation of dopants and/ordiffusion processes. The substrate 202 may also include othersemiconductors such as germanium, silicon carbide (SiC), silicongermanium (SiGe), or diamond. Alternatively, the substrate 202 mayinclude a compound semiconductor and/or an alloy semiconductor. Further,the substrate 202 may optionally include an epitaxial layer (epi-layer),may be strained for performance enhancement, may include asilicon-on-insulator (SOI) structure, and/or may have other suitableenhancement features.

Compositions of the sacrificial layers 206 and the channel layers 208are different. In an embodiment, the sacrificial layers 206 may beformed of silicon germanium (SiGe) and the channel layers 208 are formedof silicon (Si). However, other semiconductor material combinations arepossible, including those that provide for different oxidation ratesand/or etch selectivity between the sacrificial layers and channellayers. For example, either of the sacrificial layers 206 and channellayers 208 may include other materials such as germanium, a compoundsemiconductor such as silicon carbide, gallium arsenide, galliumphosphide, indium phosphide, indium arsenide, and/or indium antimonide,an alloy semiconductor such as SiGe, GaAsP, AlInAs, AlGaAs, InGaAs,GaInP, and/or GaInAsP, or combinations thereof. By way of example,epitaxial growth of the layers of the stack 204 may be performed by amolecular beam epitaxy (MBE) process, a vapor phase epitaxy (VPE)process, a metalorganic chemical vapor deposition (MOCVD) process,and/or other suitable epitaxial growth processes. In some embodiments,the channel layers 208 may include the same material as the substrate202. In some embodiments, the sacrificial layers 206 and channel layers208 are substantially dopant-free (i.e., having an extrinsic dopantconcentration from about 0 cm⁻³ to about 1×10¹⁷ cm⁻³), where forexample, no intentional doping is performed during the epitaxial growthprocess.

It is noted that three (3) layers of the sacrificial 206 and three (3)layers of the channel layers 208 are alternately arranged as illustratedin FIGS. 2A and 2B as well as in other figures, which are forillustrative purposes only and not intended to be limiting beyond whatis specifically recited in the claims. It can be appreciated that anynumber of epitaxial layers can be formed in the epitaxial stack 204. Thenumber of layers depends on the desired number of channels members forthe device 200. In some embodiments, a number of second semiconductorlayers 208 is between 2 and 8. In some embodiments, in order to formboth vertical nanosheet channel members and horizontal channel members,a first thickness T1 of each of the channel layers 208 is greater thanthe second thickness T2 of each of the sacrificial layers 206. In someinstances, a ratio of the first thickness T1 to the second thickness T2may be between about 0.8 and about 4, such as between about 1.5 andabout 4. The first thickness T1 may be between about 6 nanometers (nm)and about 16 nm and the second thickness T2 may be between about 2 nmand about 6 nm.

Referring to FIGS. 1, 3A, 3B, 4A, and 4B, the method 100 includes ablock 104 where a first fin-shaped structure 210-1 is formed in a firstarea 1000 (or first device area 1000) of the substrate 202 and a secondfin-shaped structure 210-2 is formed in 211 in a second area 2000 (or asecond device area 2000) of the substrate 202. FIG. 3A illustrates afragmentary cross-sectional view of the first area 1000 along the Ydirection and FIG. 3B illustrate a fragmentary cross-sectional view ofthe first area 1000 along the X direction. FIG. 4A illustrates afragmentary cross-sectional view of the second area 2000 along the Ydirection and FIG. 4B illustrate a fragmentary cross-sectional view ofthe second area 2000 along the X direction. As shown in FIGS. 3B and 4B,the first fin-shaped structure 210-1 and the second fin-shaped structure210-2 are formed from the stack 204 and a portion of the substrate 202.The first fin-shaped structure 210-1 has a first fin width F1 along theY direction and the second fin-shaped structure 210-2 has a second finwidth F2 along the Y direction. The second fin width F2 is smaller thanthe first fin width F1. In some instances, the first fin width F1 may bebetween about 14 nm and about 64 nm and the second fin width F2 may bebetween about 4 nm and about 8 nm. The smaller second fin width F2 helpsreduces the footprint of transistors formed in the second area 2000,thereby increasing the packing density of transistors in the second area2000.

While not shown, a fin-top hard mask layer may be deposited over thestack 204 and may be patterned to form an etch mask for patterning ofthe stack 204 and the substrate 202 into the first fin-shaped structure210-1 and the second fin-shaped structure 210-2. The fin-top hard masklayer may be a single layer or a multilayer. In some implementations,the fin-top hard mask layer may include silicon oxide, silicon nitride,silicon oxynitride, silicon oxycarbonitride, silicon carbide, or acombination thereof. In embodiments where the fin-top hard mask layer isa multilayer, the fin-top hard mask layer may include a silicon oxidelayer deposited on the stack 204 and a silicon nitride layer depositedon the silicon oxide layer. Operations at block 104 may includephotolithography processes and etch processes. An example process mayinclude photoresist coating (e.g., spin-on coating) on the fin-top hardmas layer, soft baking, mask aligning, exposure, post-exposure baking,photoresist developing, rinsing, drying (e.g., spin-drying and/or hardbaking), other suitable lithography techniques, and/or combinationsthereof. In some embodiments, the etching process may include dryetching (e.g., RIE etching), wet etching, and/or other etching methods.In some embodiments shown in FIGS. 3B and 4B, the patterning also etchesinto the substrate 202 such that each of the first fin-shaped structure210-1 and the second fin-shaped structure 210-2 includes a base portion202B formed from the substrate 202 and an upper portion formed from thestack 204. The upper portion includes the sacrificial layers 206 andchannel layers 208 of the stack 204. In some embodiments, the firstfin-shaped structure 210-1 and the second fin-shaped structure 210-2 maybe fabricated using double-patterning or multi-patterning processes.Generally, double-patterning or multi-patterning processes combinephotolithography and self-aligned processes, allowing patterns to becreated that have, for example, pitches smaller than what is otherwiseobtainable using a single, direct photolithography process. For example,in one embodiment, a material layer is formed over a substrate andpatterned using a photolithography process. Spacers are formed alongsidethe patterned material layer using a self-aligned process. The materiallayer is then removed, and the remaining spacers, or mandrels, may thenbe used to pattern the first fin-shaped structure 210-1 and the secondfin-shaped structure 210-2 by etching the stack 204 and the substrate202. The etching process can include dry etching, wet etching, reactiveion etching (RIE), and/or other suitable processes. As shown in FIGS. 3Band 4B, the first fin-shaped structure 210-1 and the second fin-shapedstructure 210-2 extend lengthwise along the X direction.

Reference is still made to FIGS. 3B and 4B. After the first fin-shapedstructure 210-1 and the second fin-shaped structure 210-2 are formed inthe first area 1000 and the second area 2000, respectively, an isolationfeature 212 is formed between neighboring fin-shaped structures (e.g., afirst fin-shaped structure 210-1 and a neighboring first fin-shapedstructure 210-1 or a second fin-shaped structure 210-2 and a neighboringsecond fin-shaped structure 210-2). The isolation feature 212 may alsobe referred to as a shallow trench isolation (STI) feature 212. By wayof example, in some embodiments, a dielectric layer is first depositedover the workpiece 200, filling the trenches between the firstfin-shaped structures 210-1 and the second fin-shaped structures 210-2with the dielectric material. In some embodiments, the dielectric layermay include silicon oxide, silicon nitride, silicon oxynitride,fluorine-doped silicate glass (FSG), a low-k dielectric, combinationsthereof, and/or other suitable materials. In various examples, thedielectric layer may be deposited by a CVD process, a subatmospheric CVD(SACVD) process, a flowable CVD process, an ALD process, a physicalvapor deposition (PVD) process, and/or other suitable process. Thedeposited dielectric material is then thinned and planarized, forexample by a chemical mechanical polishing (CMP) process. The planarizeddielectric layer is further recessed by a dry etching process, a wetetching process, and/or a combination thereof to form the STI features212. After the recess, at least the upper portions of the firstfin-shaped structures 210-1 and the second fin-shaped structures 210-2rise above the STI features 212.

Referring still to FIGS. 1, 5A,5B, 6A, 6B, 7A, 7B, 8A, and 8B, method100 includes a block 106 where dummy gate stacks 220 are formed overchannel regions 21CC of the first fin-shaped structure 210-1 and overchannel regions 22CC of the second fin-shaped structure 210-2. In someembodiments, a gate replacement process (or gate-last process) isadopted where the dummy gate stacks 220 serve as placeholders forfunctional gate structures and are to be removed and replaced by thefunctional gate structures in a subsequent process. Other processes andconfiguration are possible. Reference is now made to FIGS. 5A, 5B, 6Aand 6B. To form dummy gate stacks 220, a dummy dielectric layer 214, adummy gate electrode layer 216, and a gate-top hard mask 218 aresequentially deposited over the first area 1000 and the second area 2000using a CVD process, a subatmospheric CVD (SACVD) process, a flowableCVD process, an ALD process. In some implementations, the dummydielectric layer 214 may be formed of silicon oxide, silicon nitride, orother suitable dielectric material and functions to prevent damages tothe first fin-shaped structure 210-1 and the second fin-shaped structure210-2 during subsequent processes (e.g., formation of the dummy gatestacks). The dummy gate electrode layer 216 may be formed ofpolysilicon. The gate-top hard mask 218 may be a single layer or amultilayer and may include silicon oxide, silicon nitride, siliconoxynitride, silicon carbide, silicon oxycarbonitride, or a combinationthereof. In instances where the gate-top hard mask 218 is a multilayer,the gate-top hard mask 218 may include a silicon oxide layer and asilicon nitride layer on the silicon oxide layer.

Reference is now made to FIGS. 7A, 7B, 8A, and 8B, after the deposition,the gate-top hard mask 218, the dummy gate electrode layer 216, and thedummy dielectric layer 214 are patterned by a patterning process thatmay include a lithography process (e.g., photolithography or e-beamlithography) and an etching process. The photolithography process mayfurther include photoresist coating (e.g., spin-on coating), softbaking, mask aligning, exposure, post-exposure baking, photoresistdeveloping, rinsing, drying (e.g., spin-drying and/or hard baking),other suitable lithography techniques, and/or combinations thereof. Insome embodiments, the etching process may include dry etching (e.g., RIEetching), wet etching, and/or other etching methods. Referring to FIGS.7A and 8A, dummy gate stacks 220 are formed over the substrate 202 andare at least partially disposed over the first fin-shaped structure210-1 and the second fin-shaped structure 210-2. After patterning, thedummy dielectric layer 214 and the dummy gate electrode layer 216 areshaped into dummy gate stacks 220. The portions of the first fin-shapedstructure 210-1 underlying the dummy gate stacks 220 are the channelregions 21CC of the first fin-shaped structure 210-1. With respect tothe first fin-shaped structure 210-1 in the first area 1000, the dummygate stacks 220 may also define source/drain regions 21SD adjacent toand on opposing sides of the channel region 21CC. As shown in FIG. 7A,each of the channel regions 21CC may be sandwiched along the X directionbetween two source/drain regions 21SD. Similarly, the portions of thesecond fin-shaped structure 210-2 underlying the dummy gate stacks 220are the channel regions 22CC of the second fin-shaped structure 210-2.With respect to the second fin-shaped structure 210-2 in the second area2000, the dummy gate stacks 220 may also define source/drain regions22SD adjacent to and on opposing sides of the channel region 22CC. Asshown in FIG. 8A, each of the channel regions 22CC may be sandwichedalong the X direction between two source/drain regions 22SD. Becausedummy gate stacks 220 are not formed over the source/drain regions 21SDof the first fin-shaped structure 210-1 or over the source/drain regions22SD of the second fin-shaped structure 210-2, the source/drain region21SD in FIG. 7B and the source/drain region 22SD in FIG. 8B are notdisposed under a dummy gate stack 220.

Referring to FIGS. 1, 9A, 9B, 10A, and 10B, the method 100 includes ablock 108 where a gate spacer layer 222 is deposited over the substrate202, including along sidewalls of the dummy gate stacks 220. In someembodiments, spacer material for forming the gate spacer layer 222 isdeposited conformally over the workpiece 200, including over topsurfaces and sidewalls of the dummy gate stack 220. The term“conformally” may be used herein for ease of description of a layerhaving substantially uniform thickness over various regions. The gatespacer layer 222 may have a single-layer construction or includemultiple layers. In some embodiments represented in FIGS. 9A and 10A,the gate spacer layer 222 includes a single-layer construction. The gatespacer layer 222 may include silicon oxide, silicon oxynitride, siliconnitride, silicon carbonitride, silicon oxycarbide, siliconoxycarbonitride, other suitable dielectric material, or a combinationthereof. The spacer material may be deposited over the dummy gate stack220 using processes such as, CVD process, a subatmospheric CVD (SACVD)process, a flowable CVD process, an ALD process, or other suitableprocess. The spacer material is then etched back in an anisotropic etchprocess to form the gate spacer layer 221. The anisotropic etch processexposes portions of the first fin-shaped structure 210-1 and the secondfin-shaped structure 210-2 adjacent to and not covered by the dummy gatestack 220 (e.g., in source/drain regions 21SD in the first area 1000 or22SD in the second area 2000). Portions of the spacer material directlyabove the dummy gate stack 220 may be partially or completely removed bythis anisotropic etching process while the gate spacers layer 222 remainon sidewalls of the dummy gate stacks 220.

Referring to FIGS. 1, 9A, 9B, 10A, and 10B, the method 100 includes ablock 110 where the source/drain regions 21SD in the first area 1000 andthe source/drain regions 22SD in the second area 2000 are recessed toform source/drain trenches 224. In some implementations, the recessingis performed by etching the source/drain regions 21SD in the first area1000 and the source/drain regions 22SD in the second area 2000 using thedummy gate stack 220 and the gate spacer layer 222 as an etch mask. Therecessing may include a dry etch process that may implement anoxygen-containing gas, a fluorine-containing gas (e.g., CF₄, SF₆, CH₂F₂,CHF₃, and/or C₂F₆), a chlorine-containing gas (e.g., Cl₂, CHCl₃, CCl₄,and/or BCl₃), a bromine-containing gas (e.g., HBr and/or CHBR₃), aniodine-containing gas, other suitable gases and/or plasmas, and/orcombinations thereof. In some embodiments represented in FIGS. 9A and10A, the upper portion of the first fin-shaped structure 210-1 and thesecond fin-shaped structure 210-2 are recessed to form source/draintrenches 224. The source/drain trenches 224 expose sidewalls thesacrificial layers 206 and the channel layers 208. In someimplementations, at least a portion of the base portions 202B of thefirst fin-shaped structure 210-1 and the second fin-shaped structure210-2 are recessed as well. That is, the source/drain trench 224 mayextend into the base portions 202B in the first area 1000 and the secondarea 2000. The bottoms of the source/drain trenches 224 are shown inFIGS. 9B and 10B and may have a concave shape.

Referring to FIGS. 1, 11A, 11B, 12A, and 12B, method 100 includes ablock 112 where inner spacer features 226 are formed. In an exampleprocess, the formation of the inner spacer features 226 includesselective and partial removal of the sacrificial layers 206 to forminner spacer recesses (not explicitly shown as they are now filled withinner spacer features 226) and formation of inner spacer features 226 inthe inner spacer recesses. When the sacrificial layers 206 exposed inthe source/drain trenches 224 selectively and partially recessed to forminner spacer recesses, the exposed channel layers 208 are substantiallyunetched. In an embodiment where the channel layers 208 consistessentially of Si and sacrificial layers 206 consist essentially ofSiGe, the selective recess of the sacrificial layers 206 may include aSiGe oxidation process followed by a SiGe oxide removal. In thoseembodiments, the SiGe oxidation process may include use of ozone. Insome embodiments, the selective recess may be a selective isotropicetching process (e.g., a selective dry etching process or a selectivewet etching process), and the extent the sacrificial layers 206 arerecessed is controlled by duration of the etching process. In someembodiments, the selective dry etching process may include use of one ormore fluorine-based etchants, such as fluorine gas orhydrofluorocarbons. In some embodiments, the selective wet etchingprocess may include a hydro fluoride (HF) or NH₄OH etchant.

The formation of the inner spacer features 226 in the inner spacerrecesses include deposition of an inner spacer layer over the workpiece200 and etch back of inner spacer layer outside of the inner spacerrecesses to form the inner spacer features 226. In some embodiments, theinner spacer layers may be deposited over the workpiece 200 by CVD,PECVD, LPCVD, ALD or other suitable method. The inner spacer layer maybe formed of aluminum oxide, zirconium oxide, tantalum oxide, yttriumoxide, titanium oxide, lanthanum oxide, silicon oxide, siliconcarbonitride, silicon oxycarbonitride, silicon oxycarbide, low-kmaterial, other suitable metal oxide, or a combination thereof.Subsequently, the deposited inner spacer layer may be etched back toform inner spacer features 226 in the inner spacer recesses.

Referring to FIGS. 1, 13A, 13B, 14A, and 14B, the method 100 includes ablock 114 where first source/drain features 228-1 are formed in thesource/drain trenches 224 in the first area 1000 and second source/drainfeatures 228-2 are formed in the source/drain trenches 224 in the secondarea 2000. The first source/drain features 228-1 and the secondsource/drain features 228-2 may include n-type source/drain features forn-type devices and p-type epitaxial source/drain features for p-typedevices. In some embodiments, both the first source/drain features 228-1and the second source/drain features 228-2 are of the same type and maybe formed simultaneously. In some other embodiments, the firstsource/drain features 228-1 and the second source/drain features 228-2are of different types and may be formed separately. For example, thefirst source/drain features 228-1 may be n-type source/drain featuresand the second source/drain features 228-2 may be p-type source/drainfeatures. The first source/drain features 228-1 and the secondsource/drain features 228-2 may be formed using suitable epitaxialprocesses, such as CVD deposition techniques (e.g., vapor-phase epitaxy(VPE), ultra-high vacuum CVD (UHV-CVD)), molecular beam epitaxy (MBE),and/or other suitable processes. In some implementations, the epitaxialgrowth of the first source/drain features 228-1 and the secondsource/drain features 228-2 may be selective to the surfaces of thechannel layers 208 and the substrate 202 (or the base portions 202B).Because the first fin-shaped structure 210-1 is wider than the secondfin-shaped structure 210-2 along the Y direction, the first source/drainfeature 228-1 is also wider than the second source/drain feature 228-2along the Y direction. Example n-type epitaxial source/drain featuresmay include Si, GaAs, GaAsP, SiP, or other suitable material. The n-typeepitaxial source/drain features may be in-situ doped during theepitaxial process by introducing doping species including n-typedopants, such as phosphorus (P) or arsenic (As); and/or other suitabledopants including combinations thereof. If the n-type epitaxialsource/drain features are not in-situ doped, an implantation process(i.e., a junction implant process) is performed to dope the n-typeepitaxial source/drain features. Example p-type epitaxial source/drainfeatures may include Si, Ge, AlGaAs, SiGe, boron-doped SiGe, or othersuitable material. The p-type epitaxial source/drain features may bein-situ doped during the epitaxial process by introducing doping speciesincluding p-type dopants, such as boron (B) or BF₂, and/or othersuitable dopants including combinations thereof. If the p-type epitaxialsource/drain features are not in-situ doped, an implantation process(i.e., a junction implant process) is performed to dope the p-typeepitaxial source/drain features.

Referring to FIGS. 1, 15A, 15B, 15C, 16A, 16B, and 16C, method 100includes a block 116 where a contact etch stop layer (CESL) 230 and aninterlayer dielectric (ILD) layer 232 are formed of the firstsource/drain features 228-1 and the second source/drain features 228-2.FIG. 15A illustrates a fragmentary cross-sectional view of the firstarea 1000 along the Y direction. FIGS. 15B and 15C illustratefragmentary cross-sectional views of the channel region 21CC and thesource/drain region 21SD in the first area 1000. FIG. 16A illustrates afragmentary cross-sectional view of the second area 2000 along the Ydirection. FIGS. 16B and 16C illustrate fragmentary cross-sectionalviews of the channel region 22CC and the source/drain region 22SD in thesecond area 2000. In some embodiments, the CESL 230 is first depositedover the workpiece 200, including on the first source/drain features228-1 in the first area 1000, the second source/drain features 228-2 inthe second area 2000, and top surfaces of the isolation feature 212. Insome examples, the CESL 230 may include a silicon nitride layer, asilicon oxide layer, a silicon oxynitride layer, and/or other materialsknown in the art. The CESL 230 may be formed by CVD or ALD. After thedeposition of the CESL 230, the ILD layer 232 is deposited over theworkpiece 200, including over the CESL 230. In some embodiments, the ILDlayer 232 includes materials such as tetraethylorthosilicate (TEOS)oxide, un-doped silicate glass, or doped silicon oxide such asborophosphosilicate glass (BPSG), fused silica glass (FSG),phosphosilicate glass (PSG), boron doped silicon glass (BSG), and/orother suitable dielectric materials. The ILD layer 232 may be depositedby a PECVD process, a spin-on coating process, or other suitabledeposition technique. In some embodiments, after formation of the ILDlayer 232, the workpiece 200 may be annealed to improve integrity of theILD layer 232. After the deposition and annealing of the ILD layer 232,the workpiece 200 may be planarized by, for example, a chemicalmechanical polishing (CMP) process, to form a level top surface forfurther processing.

Referring to FIGS. 1, 17A, 17B, 17C, 18A, 18B, and 18C, method 100includes a block 118 where first channel members 208-1 in the first area1000 and second channel members 208-2 in the second area 2000 arereleased. In an example process, operations at block 118 include removalof the dummy gate stacks 220 and selective removal of the sacrificiallayers 206. FIG. 17A illustrates a fragmentary cross-sectional view ofthe first area 1000 along the Y direction. FIGS. 17B and 17C illustratefragmentary cross-sectional views of the channel region 21CC and thesource/drain region 21SD in the first area 1000. FIG. 18A illustrates afragmentary cross-sectional view of the second area 2000 along the Ydirection. FIGS. 18B and 18C illustrate fragmentary cross-sectionalviews of the channel region 22CC and the source/drain region 22SD in thesecond area 2000. Reference is first made to FIGS. 17A, 17B, 18A, and18B. In the depicted embodiment, a selective etch process completelyremoves dummy gate stacks 220 to expose sacrificial layers 206 andchannel layers 208 in channel regions 21CC in the first area 1000 andchannel regions 22CC in the second area 2000. As shown in FIGS. 17C and18C, the CESL 230 and the ILD layer 232 protect the first source/drainfeatures 228-1 and the second source/drain features 228-2 from beingdamaged during the operations at block 118. The etching process may be adry etching process, a wet etching process, other suitable etchingprocess, or combinations thereof. The etching process may be selectedsuch that it is selective to the dummy gate stacks 220 and does notsubstantially etch the CESL 230, the ILD layer 232, and the gate spacerlayer 222. Referring still to FIGS. 17A, 17B, 18A, and 18B, a selectiveetch process selectively etches the sacrificial layer 206 with minimalor no etching of the channel layers 208, the gate spacer layer 222, theILD layer 232, and inner spacer features 226. Various etching parameterscan be tuned to achieve selective etching of sacrificial layers 206,such as etchant composition, etching temperature, etching solutionconcentration, etching time, etching pressure, source power, RF biasvoltage, RF bias power, etchant flow rate, other suitable etchingparameters, or combinations thereof. For example, an etchant is selectedfor the etching process that etches the material of the sacrificiallayers 206 (in the depicted embodiment, silicon germanium) at a higherrate than the material of the channel layers 208 (in the depictedembodiment, silicon). That is, the etchant in the selective etch processhas a high etch selectivity with respect to the material of sacrificiallayers 206. The etching process may be a dry etching process, a wetetching process, other suitable etching process, or combinationsthereof. In some embodiments, a dry etching process (such as an RIEprocess) utilizes a fluorine-containing gas (for example, SF6) toselectively etch the sacrificial layers 206. In some embodiments, aratio of the fluorine-containing gas to an oxygen-containing gas (forexample, O2 or O3), an etching temperature, and/or an RF power may betuned to selectively etch silicon germanium or silicon. In someembodiments, a wet etching process utilizes an etching solution thatincludes ammonium hydroxide (NH₄OH) and water (H₂O) to selectively etchthe sacrificial layers 206. In some embodiments, a chemical vapor phaseetching process using hydrochloric acid (HCl) may selectively etch thesacrificial layers 206. Upon conclusion of the operations at block 118,the channel layers 208 in the channel regions 21CC in the first area1000 may be released from the sacrificial layers 206 to form firstchannel members 208-1 and the channel layers 208 in the channel regions22CC in the second area 2000 may be released from the sacrificial layers206 to form second channel members 208-2. Operations at block 118 formgate trenches 234 over the channel regions 21CC in the first area 1000and channel regions 22CC in the second area 2000.

Reference is now made to FIGS. 17A and 18A. As shown in FIG. 17A, eachof the first channel members 208-1 in the channel regions 21CC includesa first channel portion 28C and a first connection portion 28K. Thefirst channel portions 28C are fully suspended over the base portion202B and do not underlie the gate spacer layer 222. The first connectionportion 28K underlie the gate spacer layer 222 and are disposed eitherbetween two inner spacer features 226 or between the gate spacer layer222 and an inner spacer feature 226. As shown in FIG. 18A, each of thesecond channel members 208-2 in the channel regions 22CC includes asecond channel portion 30C and a second connection portion 30K. Thesecond channel portions 30C are fully suspended over the base portion202B and do not underlie the gate spacer layer 222. The secondconnection portion 30K underlie the gate spacer layer 222 and aredisposed either between two inner spacer features 226 or between thegate spacer layer 222 and an inner spacer feature 226.

Referring to FIGS. 1, 19A, 19B, 19C, 20A, 20B, and 20C, method 100includes a block 120 where the first channel members 208-1 in the firstarea 1000 are trimmed to form the third channel members 208-3. FIG. 19Aillustrates a fragmentary cross-sectional view of the first area 1000along the Y direction. FIGS. 19B and 19C illustrate fragmentarycross-sectional views of the channel region 21CC and the source/drainregion 21SD in the first area 1000. FIG. 20A illustrates a fragmentarycross-sectional view of the second area 2000 along the Y direction.FIGS. 20B and 20C illustrate fragmentary cross-sectional views of thechannel region 22CC and the source/drain region 22SD in the second area2000. In some embodiments, in order to selectively trim the firstchannel members 208-1, a photoresist mask 236 or a masking layer 236 maybe formed over the second area 2000 while the first area 1000 isexposed. Formation of the photoresist mask 236 may include deposition ofa photoresist material over the workpiece 200 and patterning of thephotoresist material using photolithography techniques to expose thefirst area 1000. In some implementations, the photoresist layer may bedeposited using spin-on coating or a suitable method. In someembodiments, the trimming of the first channel members 208-1 may includeuse of an etch process that is selective to the first channel members208-1, which may be formed of silicon. In some other embodiments, thetrimming process may include a two-step process. A first step of anexample two-step process includes partial oxidation of the first channelmembers 208-1 to form a silicon oxide layer. A second step of theexample two-step process includes selective removal of the silicon oxidelayer. For example, the selective removal of the silicon oxide layer mayinclude use of a diluted hydrofluoric acid (DHF) or bufferedhydrofluoric acid (BHF). After the trimming of the first channel members208-1, the photoresist mask 236 over the second area 2000 may be removedusing a suitable process, such as ashing. At this point, the thirdchannel members 208-3 in the first area 1000 and the second channelmembers 208-2 in the second area 2000 are substantially formed. As willbe described further in conjunction with FIGS. 27, 28, and 29, each ofthe third channel members 208-3 has a width greater than its height andthus has a horizontal nanosheet orientation and each of the secondchannel members 208-2 has a height greater than its width and thus has avertical nanosheet orientation.

Reference is now made to FIGS. 19A and 20A. As shown in FIG. 19A,because the third channel members 208-3 are formed from trimming of thefirst channel members 208-1, the first channel portion 28C in FIG. 17Ais trimmed to form third channel portions 28C′ while the firstconnection portion 28K is protected and untrimmed. That is, each of thethird channel members 208-3 includes a third channel portion 28C′ andthe first connection portion 28K. Due to the masking of the photoresistmask 236, the second channel members 208-2 do not undergo anydimensional changes at block 120. Because the third channel members208-3 in the first area 1000 and the second channel members 208-2 in thesecond area 2000 are formed from the same stack 204, a pitch of thethird channel members 208-3 may be substantially equal to a pitch of thesecond channel members 208-2. Due to the trimming at block 120, adifference between a height of the third channel portion 28C′ (along theZ direction) and a height of the first connection portion 28K (along theZ direction) may be between about 1 nm and about 8 nm. In contrast, adifference between a height of the second channel portion 30C (along theZ direction) and a height of the second connection portion 30K (alongthe Z direction) may be insubstantial, such as between about 0 nm andabout 1 nm. Both a thickness of the first connection portion 28 k and athickness of the second connection portion 30K may be substantiallyidentical to the first thickness T1 of the channel layer 208, which isbetween about 6 nm and about 16 nm.

Referring to FIGS. 1, 21A, 21B, 21C, 22A, 22B, 22C, 23A, 23B, 23C, 24A,24B, and 24C, method 100 includes a block 122 where gate structures 250are formed over the third channel members 208-3 in the first area 1000and the second channel members 208-2 in the second area 2000. FIGS. 21Aand 23A illustrate fragmentary cross-sectional views of the first area1000 along the Y direction. FIGS. 21B, 23B, 21C, and 23C illustratefragmentary cross-sectional views of the channel region 21CC and thesource/drain region 21SD in the first area 1000 along the X direction.FIGS. 22A and 24A illustrate fragmentary cross-sectional views of thesecond area 2000 along the Y direction. FIGS. 22B, 24B, 22C, and 24Cillustrate fragmentary cross-sectional views of the channel region 22CCand the source/drain region 22SD in the second area 2000 along the Xdirection. Each of the gate structures 250 may include an interfaciallayer 238, a gate dielectric layer 240, and a gate electrode 242.Referring first to FIGS. 21A, 21B, 22A, and 22B at block 122, theinterfacial layer 238 may be formed conformally on the third channelmembers 208-3 in the first area 1000 and on the second channel members208-2 in the second area 2000. In some implementations, the interfaciallayer 238 may include a dielectric material such as silicon oxide,hafnium silicate, or silicon oxynitride and may be formed by chemicaloxidation, thermal oxidation, atomic layer deposition (ALD), chemicalvapor deposition (CVD), and/or other suitable method.

Referring then to FIGS. 23A, 23B, 24A, and 24B, the gate dielectriclayer 240 is then deposited over the interfacial layer 238 to wraparound the third channel members 208-3 in the first area 1000 and thesecond channel members 208-2 in the second area 2000. The gatedielectric layer 240 may include one or more high-k dielectricmaterials. High-k dielectric materials, as used and described herein,include dielectric materials having a high dielectric constant, forexample, greater than that of thermal silicon oxide (−3.9). Examplehigh-K dielectric material for the gate dielectric layer 240 may includehafnium oxide (HfO), titanium oxide (TiO₂), hafnium zirconium oxide(HfZrO), tantalum oxide (Ta₂O₅), hafnium silicon oxide (HfSiO₄),zirconium oxide (ZrO₂), zirconium silicon oxide (ZrSiO₂), lanthanumoxide (La₂O₃), aluminum oxide (Al₂O₃), zirconium oxide (ZrO), yttriumoxide (Y₂O₃), SrTiO₃ (STO), BaTiO₃ (BTO), BaZrO, hafnium lanthanum oxide(HfLaO), lanthanum silicon oxide (LaSiO), aluminum silicon oxide(AlSiO), hafnium tantalum oxide (HfTaO), hafnium titanium oxide (HfTiO),(Ba,Sr)TiO₃ (BST), silicon nitride (SiN), silicon oxynitride (SiON),combinations thereof, or other suitable material. The gate dielectriclayer 240 may be formed by ALD, physical vapor deposition (PVD), CVD,oxidation, and/or other suitable methods. In some instances where thesecond thickness T2 (shown in FIG. 2A) of the sacrificial layers 206 isbetween about 2 nm and about 4 nm, the gate dielectric layer 240 in thechannel region 22CC in the second area 2000 may merge betweenneighboring second channel members 208-2, as shown in FIGS. 24A and 24B.In those instances, the merged gate dielectric layer 240 betweenneighboring second channel members 208-2 may prevent further layers,such as the gate electrode 242 from wrapping completely around thesecond channel members 208-2. In other instances where the secondthickness T2 (shown in FIG. 2A) of the sacrificial layers 206 is greaterthan about 4 nm, the gate dielectric layer 240 in the channel region22CC in the second area 2000 is unlikely to merge between neighboringsecond channel members 208-2. In those alternative instances, furtherlayers, such as the gate electrode 242, may wrap completely around thesecond channel members 208-2.

Referring still to FIGS. 23A, 23B, 24A, and 24B, the gate electrode 242is then deposited over the gate dielectric layer 240. Although notseparately illustrated, the gate electrode 242 may include one or morework function layers and one or more metal fill layers. In someimplementations, different work function layer stacks may be formed inn-type device regions and p-type device regions. In thoseimplementations, while n-type device regions and p-type device regionsmay share certain common work function layers, n-type device regions mayinclude one or more work function layers that are not present in thep-type device regions. Similarly, in alternative implementations, p-typedevice regions may include one or more work function layers that are notpresent in the n-type device regions. P-type work function layerincludes any suitable p-type work function material, such as titaniumnitride (TiN), tantalum nitride (TaN), tantalum silicon nitride (TaSiN),ruthenium (Ru), molybdenum (Mo), aluminum (Al), tungsten nitride (WN),tungsten carbonitride (WCN), zirconium silicide (ZrSi₂), molybdenumsilicide (MoSi₂), tantalum silicide (TaSi₂), nickel silicide (NiSi₂),other p-type work function material, or combinations thereof. N-typework function layer includes any suitable n-type work function material,such as titanium (Ti), aluminum (Al), silver (Ag), manganese (Mn),zirconium (Zr), titanium aluminum (TiAl), titanium aluminum carbide(TiAlC), titanium aluminum silicon carbide (TiAlSiC), tantalum carbide(TaC), tantalum carbonitride (TaCN), tantalum silicon nitride (TaSiN),tantalum aluminum (TaAl), tantalum aluminum carbide (TaAlC), tantalumsilicon aluminum carbide (TaSiAlC), titanium aluminum nitride (TiAlN),other n-type work function material, or combinations thereof. It isnoted that p-type work function layers are not limited to use in p-typedevice regions and n-type work function layers are not limited to use inn-type device regions. P-type work function layers and n-type workfunction layers may be applied in n-type device regions and p-typedevice regions to achieve desired threshold voltages. In someembodiments, the gate electrode 242 may include one or more metal filllayer. For example, a CVD process or a PVD process deposits the one ormore metal fill layer on n-type work function layer(s) and p-type workfunction layer(s), such that metal fill layer fills any remainingportion of gate trenches 234. The metal fill layer may include asuitable conductive material, such as aluminum (Al), tungsten (W),nickel (Ni), titanium (Ti), ruthenium (Ru), cobalt (Co), platinum (Pt),or copper (Cu). The metal fill layer may additionally or collectivelyinclude other metals, metal oxides, metal nitrides, other suitablematerials, or combinations thereof.

In some instances where the second thickness T2 (shown in FIG. 2A) ofthe sacrificial layers 206 is between about 2 nm and about 4 nm, thegate dielectric layer 240 in the channel region 22CC in the second area2000 may merge between neighboring second channel members 208-2, asshown in FIGS. 24A and 24B. In those instances, the merged gatedielectric layer 240 between neighboring second channel members 208-2may prevent the gate electrode 242 from extending between two adjacentsecond channel members 208-2. As such, in those instances, the gateelectrode 242 does not completely wrap around the second channel members208-2. In other instances where the second thickness T2 (shown in FIG.2A) of the sacrificial layers 206 is greater than about 4 nm, the gatedielectric layer 240 in the channel region 22CC in the second area 2000is unlikely to merge between neighboring second channel members 208-2.In those alternative instances, the gate electrode 242, may extendbetween two adjacent second channel members 208-2 and wrap completelyaround the second channel members 208-2.

Referring to FIGS. 23A, 23B, 23C, 24A, 24B, and 24C, the workpiece 200is planarized to provide a level surface. In some embodiments, theplanarization is performed to remove excess interfacial layer 238, gatedielectric layer 240, and the gate electrode 242 over the workpiece 200.For example, the planarization may include a CMP process and may beperformed until a top surface of ILD layer 232 is substantially planarwith a top surface of the gate electrode 242.

Referring to FIGS. 1, 25A, 25B, 26A, and 26B, method 100 includes ablock 124 where further processes performed. Fabrication can proceed tocontinue fabrication of the semiconductor device 200. For example,various contacts can be formed to facilitate operation of MBCtransistors in the semiconductor device 200. For example, firstsource/drain contacts 254 may be formed to electrically coupled to thefirst source/drain features 228-1 in the first area 1000 and secondsource/drain contacts 255 may be formed to electrically coupled to thesecond source/drain features 228-2 in the second area 2000. An exampleprocess to form the first source/drain contacts 254 and the secondsource/drain contacts 255 may include formation of source/drain contactopenings through the ILD layer 232 and the CESL 230, formation ofsilicide features 252, and formation of the first source/drain contacts254 and the second source/drain contacts 255 in the source/drain contactopenings. In some embodiments, the silicide features 252 may includetitanium silicide (TiSi), nickel silicide (NiSi), cobalt silicide(CoSi), or titanium silicon nitride (TiSiN). The first source/draincontacts 254 and the second source/drain contacts 255 may includetungsten (W), titanium (Ti), titanium nitride (TiN), ruthenium (Ru),cobalt (Co), nickel (Ni), or copper (Cu). In order to form furtherinterconnect structures, gate contacts, further ILD layers, further CESLlayers, and additional conductive features may be formed over theworkpiece 200. As described above, because the first fin-shapedstructure 210-1 is wider than the second fin-shaped structure 210-2along the Y direction, the first source/drain feature 228-1 is alsowider than the second source/drain feature 228-2 along the Y direction.As a consequence, a bottom surface of a first source/drain contact 254is wider than a bottom surface of the second source/drain contact 255along the Y direction. As shown in FIGS. 25C and 26C, the bottom surfaceof the first source/drain contact 254 has a first contact width C1 alongthe Y direction and the bottom surface of the second source/draincontact 255 has a second contact width C2. In some instances, the firstcontact width C1 is greater than the second contact width C2. A ratio ofthe first contact width C1 to the second contact width C2 (i.e., C1/C2)may be between about 2 and about 10.

Depending on the configurations of the stack 204, the channel members ofthe semiconductor device 200 may have different configurationsillustrated in FIGS. 27-29. Referring first to FIG. 27, each of thethird channel portions 28C′ (of the third channel members 208-3) inchannel regions 21CC in the first area 1000 may have a first width W1and a first height H1. The first width W1 is greater than the firstheight H1. For that reason, each of the third channel portions 28C′ (ofthe third channel members 208-3) has its top and bottom surfaces as itsprimary channel surfaces. As the primary channel surfaces of the thirdchannel members 208-3 extend parallel to the X-Y plane, the thirdchannel members 208-3 may be regarded as horizontal nanosheet channelmembers. In some embodiments, the first width W1 is between about 10 nmand about 60 nm and the first height H1 is between about 3 nm and about8 nm. Referring first to FIG. 28, each of the second channel portions30C (of the second channel members 208-2) in channel regions 22CC in thefirst area 1000 may have a second width W2 and a second height H2. Thesecond height H2 is greater than the second width W2. For that reason,each of the second channel members 208-2 has its sidewall surfaces asits primary channel surfaces. As the primary channel surfaces of thesecond channel members 208-2 extend parallel to the X-Z plane, thesecond channel members 208-2 may be regarded as vertical nanosheetchannel members. In some embodiments, the second width W2 is betweenabout 3 nm and about 7 nm and the second height H2 is between about 5 nmand about 15 nm. In some instances, the third channel portions 28C′ (ofthe third channel members 208-3) is wider and shorter than the secondchannel portions 30C (of the second channel members 208-2). That is, thefirst width W1 is greater than the second width W2 and the first heightH1 is smaller than the second height H2. As compared to MBC transistorshaving third channel members 208-3 in the first area 1000, the smallersecond width W2 allows MBC transistors having second channel members208-2 in the second area 2000 to have a smaller footprint and a higherpacking density on the Z-Y plane. While its second width W2 is smaller,the greater second height H2 (as compared to the first height H1) of thesecond channel members 208-2 provides additional channel width forsatisfactory drive current levels. It is noted that because the thirdchannel members 208-3 and the second channel members 208-2 are formedfrom the same stack 204, they have the same pitch P, which may bebetween about 8 nm and about 18 nm.

Upon conclusion of the operations at block 124, a first transistor 310may be formed in the first area 1000, as representatively shown in FIG.25A and a second transistor 320 may be formed in the second area 2000,as representatively shown in FIG. 26A. Both the first transistor 310 andthe second transistor 320 are MBC transistors as they include verticallystacked channel members. In some embodiments, the first transistor 310and the second transistor 320 are for different applications. Forexample, the first transistor 310 has larger drive currents than thesecond transistor 320 and may be used for high drive current orhigh-speed applications. The second transistor 320 has a smaller widththan the first transistor along the Y direction and may be used for highpacking-density applications, such as SoC and SRAM applications. Inother words, in these embodiments, the first area 1000 is a high drivecurrent device area and the second area 2000 is a high-packing densityarea. In some alternative embodiments, as explained in more detailbelow, the first transistor 310 may be more suitable for n-type devicesand the second transistor 320 may be more suitable for p-type devices interms of charge carrier mobility. In those alternative embodiments, thefirst area 1000 is an n-type device area and the second area 2000 is ap-type device area.

Reference is now made to FIGS. 27-29. As shown in FIG. 27, because thethird channel portions 28C′ (of the third channel members 208-3) areselectively trimmed at block 120 in method 100, the gate dielectriclayer 240 deposited on the third channel portions 28C′ (of the thirdchannel members 208-3) does not merge among the third channel portions28C′ (of the third channel members 208-3) and the gate structure 250,including the gate electrode 242, may wrap completely around the thirdchannel portions 28C′ (of the third channel members 208-3) in the firstarea 1000. The gate electrode 242 may also extend between the bottommostthird channel member 208-3 and the base portion 202B in the first area1000. The second channel portions 30C (of the second channel members208-2) in the second area 2000 are not trimmed at block 120 of method100 and may have a smaller inter-channel-member spacing. As shown inFIG. 28, when the second thickness T2 of the sacrificial layer 206 inthe stack 204 is between about 2 nm and about 4 nm, the gate dielectriclayer 240 on neighboring second channel portions 30C (of the secondchannel members 208-2) may merge and the gate electrode 242 may notextend between neighboring second channel portions 30C (of the secondchannel members 208-2) or between the bottommost second channel member208-2 and the base portion 202B. As shown in FIG. 29, when the secondthickness T2 of the sacrificial layer 206 in the stack 204 is greaterthan 4 nm, such as between about 4 nm and about 6 nm, the gatedielectric layer 240 on neighboring second channel portions 30C (of thesecond channel members 208-2) does not merge and the gate electrode 242may extend between neighboring second channel portions 30C (of thesecond channel members 208-2) or between the bottommost second channelmember 208-2 and the base portion 202B.

Besides providing reduced footprint while providing satisfactory channelwidth, the second channel members 208-2 may also be suitable for p-typedevices. When the substrate 202 is a silicon substrate having <100>orientation (i.e., having its primary flat surface on the (100)crystalline plane), the primary channel surfaces of the third channelmembers 208-3 are on the (100) crystalline plane while the primarychannel surfaces of the second channel members 208-2 are on the (110)crystalline plane. Because electron mobility is greatest on the (100)crystalline plane and hole mobility is greatest on the (110) crystallineplane, drive current may be maximized when the third channel members208-3 are used for n-type MBC transistors and second channel members208-2 are used for p-type MBC transistors.

In one exemplary aspect, the present disclosure is directed to asemiconductor device. The semiconductor device may include a firsttransistor and a second transistor. The first transistor includes aplurality of first channel members and a first gate structure wrappingaround each of the plurality of first channel members. The secondtransistor includes a plurality of second channel members and a secondgate structure disposed over the plurality of second channel members.Each of the plurality of first channel members has a first width and afirst height smaller than the first width and each of the plurality ofsecond channel members has a second width and a second height greaterthan the second width.

In some embodiments, a pitch of the plurality of first channel membersis identical to a pitch of the plurality of second channel members. Insome embodiments, the first width is greater than the second width. Insome instances, the first height is smaller than the second height. Insome implementations, the second gate structure includes a gatedielectric layer and a gate electrode. The gate electrode is spacedapart from the plurality of second channel members by the gatedielectric layer. The gate dielectric layer wraps around each of theplurality of second channel members, and the gate electrode does notcompletely wrap around each of the plurality of second channel members.In some implementations, the gate dielectric layer includes a firstportion adjacent one of the plurality of second channel members and asecond portion adjacent another of the plurality of second channelmembers and the first portion is contact with the second portion.

In another exemplary aspect, the present disclosure is directed to asemiconductor device. The semiconductor device may include a firsttransistor and a second transistor. The first transistor includes afirst channel member over and spaced apart from a first base portion,and a first gate structure wrapping around the first channel member. Thesecond transistor includes a second channel member over and spaced apartfrom a second base portion, and a second gate structure disposed overthe second channel member and including an interfacial layer, a gatedielectric layer and a gate electrode. The interfacial layer is disposedon the second channel member and the second base portion. The gatedielectric layer is disposed on the interfacial layer. The gateelectrode does not extend between the second channel member and thesecond base portion.

In some embodiments, the semiconductor device may further include a gatespacer layer disposed along sidewalls of the first gate structure andsidewalls of the second gate structure. In some embodiments, the firstchannel member extends lengthwise between a first source/drain featureand a second source/drain feature along a direction. The first channelmember includes a channel portion directly under the first gatestructure and a connection portion between the channel portion and thefirst source/drain feature along the direction. A height of theconnection portion is greater than a height of the channel portion. Insome implementations, the second channel member extends lengthwisebetween a first source/drain feature and a second source/drain featurealong a direction, the second channel member includes a channel portiondirectly under the second gate structure and a connection portionbetween the channel portion and the first source/drain feature along thedirection, and a height of the connection portion is greater than aheight of the channel portion. In some instances, the second transistorfurther includes a third channel member disposed over the second channelmember, the second gate structure is disposed over the third channelmember, and the gate electrode does not extend between the secondchannel member and the third channel member. In some embodiments, thefirst channel member has a first width and a first height smaller thanthe first width, and the second channel member has a second width and asecond height greater than the second width. In some instances, thefirst width is greater than the second width. In some embodiments, thefirst height is smaller than the second height.

In yet another exemplary aspect, the present disclosure is directed to amethod. The method may include depositing, on a substrate, a stackincluding a plurality of channel layers interleaved by a plurality ofsacrificial layers, patterning the stack and the substrate into a firstfin-shaped structure and a second fin-shaped structure, forming a firstdummy gate stack over a first channel region of the first fin-shapedstructure and a second dummy gate stack over a second channel region ofthe second fin-shaped structure, forming source/drain featuressandwiching the first channel region and the second channel region,removing the first dummy gate stack and the second dummy gate stack,selectively removing the sacrificial layers in the first channel regionto release channel layers in the first channel region, selectivelyremoving the sacrificial layers in the second channel region to formfirst channel members in the second channel region, selectively trimmingthe channel layers in the first channel region to form second channelmembers in the first channel region, forming a first gate structure overthe second channel members, and forming a second gate structure over thefirst channel members.

In some embodiments, the first fin-shaped structure and the secondfin-shaped structure extend lengthwise along a direction and a width ofthe first fin-shaped structure is greater than a width of the secondfin-shaped structure. In some implementations, a thickness of each ofthe plurality of channel layers is smaller than the width of the firstfin-shaped structure and the thickness of each of the plurality ofchannel layers is greater than the width of the second fin-shapedstructure. In some embodiments, the selectively removing of thesacrificial layers in the first channel region and the selectivelyremoving of the sacrificial layers in the second channel region areperformed simultaneously and the selectively trimming of the channellayers in the first channel region includes masking the second channelregion with a masking layer. In some instances, the first gate structureincludes a first gate dielectric layer in contact with the secondchannel members and a first gate electrode spaced apart from the secondchannel members. The second gate structure includes a second gatedielectric layer in contact with the first channel members and a secondgate electrode spaced apart from the first channel members. The firstgate electrode wraps around each of the second channel members and thesecond gate electrode does not wrap around each of the first channelmembers. In some embodiments, each of the first channel members has afirst height and each of the second channel members has a second heightsmaller than the first height.

The foregoing outlines features of several embodiments so that those ofordinary skill in the art may better understand the aspects of thepresent disclosure. Those of ordinary skill in the art should appreciatethat they may readily use the present disclosure as a basis fordesigning or modifying other processes and structures for carrying outthe same purposes and/or achieving the same advantages of theembodiments introduced herein. Those of ordinary skill in the art shouldalso realize that such equivalent constructions do not depart from thespirit and scope of the present disclosure, and that they may makevarious changes, substitutions, and alterations herein without departingfrom the spirit and scope of the present disclosure.

What is claimed is:
 1. A semiconductor device, comprising: a firsttransistor comprising: a plurality of first channel members, and a firstgate structure wrapping around each of the plurality of first channelmembers; and a second transistor comprising: a plurality of secondchannel members, and a second gate structure disposed over the pluralityof second channel members, wherein each of the plurality of firstchannel members has a first width and a first height smaller than thefirst width, wherein each of the plurality of second channel members hasa second width and a second height greater than the second width.
 2. Thesemiconductor device of claim 1, wherein a pitch of the plurality offirst channel members is identical to a pitch of the plurality of secondchannel members.
 3. The semiconductor device of claim 1, wherein thefirst width is greater than the second width.
 4. The semiconductordevice of claim 1, wherein the first height is smaller than the secondheight.
 5. The semiconductor device of claim 1, wherein the second gatestructure comprises a gate dielectric layer and a gate electrode,wherein the gate electrode is spaced apart from the plurality of secondchannel members by the gate dielectric layer, wherein the gatedielectric layer wraps around each of the plurality of second channelmembers, and wherein the gate electrode does not completely wrap aroundeach of the plurality of second channel members.
 6. The semiconductordevice of claim 5, wherein the gate dielectric layer comprises a firstportion adjacent one of the plurality of second channel members and asecond portion adjacent another of the plurality of second channelmembers, where the first portion is contact with the second portion. 7.A semiconductor device, comprising: a first transistor comprising: afirst channel member over and spaced apart from a first base portion,and a first gate structure wrapping around the first channel member; anda second transistor comprising: a second channel member over and spacedapart from a second base portion, and a second gate structure disposedover the second channel member and comprising an interfacial layer, agate dielectric layer and a gate electrode, wherein the interfaciallayer is disposed on the second channel member and the second baseportion, wherein the gate dielectric layer is disposed on theinterfacial layer, wherein the gate electrode does not extend betweenthe second channel member and the second base portion.
 8. Thesemiconductor device of claim 7, further comprising a gate spacer layerdisposed along sidewalls of the first gate structure and sidewalls ofthe second gate structure.
 9. The semiconductor device of claim 8,wherein the first channel member extends lengthwise between a firstsource/drain feature and a second source/drain feature along adirection, wherein the first channel member includes a channel portiondirectly under the first gate structure and a connection portion betweenthe channel portion and the first source/drain feature along thedirection, and wherein a height of the connection portion is greaterthan a height of the channel portion.
 10. The semiconductor device ofclaim 8, wherein the second channel member extends lengthwise between afirst source/drain feature and a second source/drain feature along adirection, wherein the second channel member includes a channel portiondirectly under the second gate structure and a connection portionbetween the channel portion and the first source/drain feature along thedirection, and wherein a height of the connection portion is greaterthan a height of the channel portion.
 11. The semiconductor device ofclaim 8, wherein the second transistor further comprises a third channelmember disposed over the second channel member, wherein the second gatestructure is disposed over the third channel member, wherein the gateelectrode does not extend between the second channel member and thethird channel member.
 12. The semiconductor device of claim 7, whereinthe first channel member has a first width and a first height smallerthan the first width, and wherein the second channel member has a secondwidth and a second height greater than the second width.
 13. Thesemiconductor device of claim 12, wherein the first width is greaterthan the second width.
 14. The semiconductor device of claim 12, whereinthe first height is smaller than the second height.
 15. A method,comprising: depositing, on a substrate, a stack comprising a pluralityof channel layers interleaved by a plurality of sacrificial layers;patterning the stack and the substrate into a first fin-shaped structureand a second fin-shaped structure; forming a first dummy gate stack overa first channel region of the first fin-shaped structure and a seconddummy gate stack over a second channel region of the second fin-shapedstructure; forming source/drain features sandwiching the first channelregion and the second channel region; removing the first dummy gatestack and the second dummy gate stack; selectively removing thesacrificial layers in the first channel region to release channel layersin the first channel region; selectively removing the sacrificial layersin the second channel region to form first channel members in the secondchannel region; selectively trimming the channel layers in the firstchannel region to form second channel members in the first channelregion; forming a first gate structure over the second channel members;and forming a second gate structure over the first channel members. 16.The method of claim 15, wherein the first fin-shaped structure and thesecond fin-shaped structure extend lengthwise along a direction, whereina width of the first fin-shaped structure is greater than a width of thesecond fin-shaped structure.
 17. The method of claim 16, wherein athickness of each of the plurality of channel layers is smaller than thewidth of the first fin-shaped structure, wherein the thickness of eachof the plurality of channel layers is greater than the width of thesecond fin-shaped structure.
 18. The method of claim 15, wherein theselectively removing of the sacrificial layers in the first channelregion and the selectively removing of the sacrificial layers in thesecond channel region are performed simultaneously, wherein theselectively trimming of the channel layers in the first channel regioncomprises masking the second channel region with a masking layer. 19.The method of claim 15, wherein the first gate structure comprises afirst gate dielectric layer in contact with the second channel membersand a first gate electrode spaced apart from the second channel members,wherein the second gate structure comprises a second gate dielectriclayer in contact with the first channel members and a second gateelectrode spaced apart from the first channel members, wherein the firstgate electrode wraps around each of the second channel members, whereinthe second gate electrode does not wrap around each of the first channelmembers.
 20. The method of claim 15, wherein each of the first channelmembers has a first height, wherein each of the second channel membershas a second height smaller than the first height.